MEASUREMENT
CONTROL DEVICES
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OPTICAL MICRO-ELECTROMECHANICAL DEVICE
PURPOSE
Device is used for characterization of mechanical properties (Young's modulus, Poisson ratio, yield stress, etc.) of thin films and multilayer structures under tension.

STRUCTURE
Device consists of the computer controlled piezo-actuated microtensile set up synchronised with an electronic speckle pattern interferometer. During the measurements the stress strain dependence (or strain dependence versus time) of micro-objects is registered.

APPLICATION
Device can be employed to test elastic and plastic properties, and relaxation processes for thin metal, dielectric as well as multilayered freestanding films. One of the possible application areas could be an analysis of mechanical properties of elements of micro-electromechanical systems (MEMS).

TECHNICAL DATA


THE LEVEL OF TECHNOLOGY COMPLETION
Experimental system, subsequent improvement of technical characteristics.

POSSIBLE CO-OPERATION
Search for partners for development and commercialization of a product.





CONTACTS:
KAUNAS UNIVERSITY OF TECHNOLOGY
Department of Physics
Studentu str. 50, LT-3031 Kaunas, Lithuania
Tel. +370 37 351128, 351028
Fax +370 37 456472
E-mail: liudvikas.augulis@ktu.lt