MEASUREMENT – CONTROL DEVICES PREVIOUS CONTENTS NEXT OPTICAL MICRO-ELECTROMECHANICAL DEVICE PURPOSE Device is used for characterization of mechanical properties (Young's modulus, Poisson ratio, yield stress, etc.) of thin films and multilayer structures under tension. STRUCTURE Device consists of the computer controlled piezo-actuated microtensile set up synchronised with an electronic speckle pattern interferometer. During the measurements the stress – strain dependence (or strain dependence versus time) of micro-objects is registered. APPLICATION Device can be employed to test elastic and plastic properties, and relaxation processes for thin metal, dielectric as well as multilayered freestanding films. One of the possible application areas could be an analysis of mechanical properties of elements of micro-electromechanical systems (MEMS). TECHNICAL DATA THE LEVEL OF TECHNOLOGY COMPLETION Experimental system, subsequent improvement of technical characteristics. POSSIBLE CO-OPERATION Search for partners for development and commercialization of a product. CONTACTS: KAUNAS UNIVERSITY OF TECHNOLOGY Department of Physics Studentu str. 50, LT-3031 Kaunas, Lithuania Tel. +370 37 351128, 351028 Fax +370 37 456472 E-mail: liudvikas.augulis@ktu.lt